Micro-Optical Fluidic Analysis System for Environmental and Quality Control
نویسنده
چکیده
A microfluidic analysis system based on photometric measurements is presented. Feasibility of photometric analysis in silicon flow channels has been shown using commercially available reagents and a microspectrometer. Quantitative determination of iron and phosphate in water in the concentration range around the legal limit for drinking water has been carried out as an example. An integrated analysis system for dosing, mixing, and photometric measurements has been realized by silicon micromachining, taking advantage of rapid laser protoyping by Nd:YAG laser direct writing. An optimized laser process has been developed for cutting silicon wafers.
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